The Pelcotec CDMS-XY is easy to use and extremely convenient for quickly and accurately calibrating the magnification of the SEMFE-SEMFIBCD-SEMLMAFM.It has scale marks on both the X and Y axes, allowing two-axis calibration without rotating the stage. it's easy較正が簡単に行えます。

Full-featured, traceable calibration standards for a wide range of measurements Manufactured with the latest semiconductor MEMS manufacturing technology for excellent line edge quality現します。

Standards up to 5 µm are precisely deposited on ultra-flat silicon substrates with 50 nm of chromium, and standards from 2 µm to 100 nm are made by combining 20 nm of chromium with 50 nm of gold on Si. Cr and Au/Cr provide excellent contrast in both SE and BSE imaging modes and samples can be easily identified in comparison to standard Si etched silicon substrates of chromium chromium/gold. All features are conductive so there are no charging issues with this calibration standard CDMS standards are robust and can be cleaned with a plasma cleanerいて洗浄することができます。

Small standards are nested for easy navigation and quick calibration Accuracy of standards is better than 0.3% Actual standard size is 2.5 x 2.5mm and thickness is 675μm 10μm No coating on Si surface Each Pelcotec CDMS-XY standard has a unique identification numberが付けられています。

Pelcotec CDMS-XY-1CNIST National Institute of Standards and Technology CertifiedμmまでのStandard sampleideal for desktop SEM and low to medium magnification applicationsです。

Pelcotec CDMS-XY-0.1CNISTST（Certified by the National Institute of Standards and Technologyた、Supports all SEM and most FE-SEM applications with standard samples from 2.0mm to 100nm and magnifications up to 10.2Mxします。

You can choose your desired type from no sample stand or 13 types of sample stands.す。

Product image from leftら）

・Appearance of standard sample

・CDMS-XY-1C Magnified photo