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Multi-target calibration standard sample
¥71,720
（税込）
¥65,200 （税抜）
Micro-Tec MTC-5 Multi-Target Calibration Standard Sample
Integrating calibration and image quality assessment into a single standard sample.
The new, innovative Micro-Tec MTC-5 multi-target scale calibration standard is designed using a highly planar, conductive silicon substrate with corrosion-resistant chromium lines. Utilizing state-of-the-art semiconductor manufacturing techniques, it produces precise patterns. Micro-Tec's multi-target scale provides bright, high-contrast images, facilitating easy calibration.
Micro-Tec's multi-target reticles are designed for use in reflective light imaging, optical quality control systems, and low-magnification SEM imaging.
* Magnification adjustment * Measurement of critical dimensions * Distortion correction * Image quality evaluation * Quality control measurement
There are four different patterns in the MTC-5 calibration standard sample.
* Circular patterns with diameters ranging from 5μm to 5mm * Square patterns ranging from 5×5μm to 5×5mm * Hexagonal patterns ranging from 5μm to 5mm * 5×5mm cross-scale patterns with 0.002mm spacing
The vapor-deposited Cr lines are in the same focal plane as the substrate, resulting in clearer display and providing more signal than etched patterns. Furthermore, they offer the advantage of less dust particle accumulation on the pattern.
Each calibration standard sample is marked with a product ID serial number unique to the substrate. The Micro-Tec MTC-5 calibration standard samples are NIST traceable, and each standard sample comes with a wafer-level traceability certificate.
We offer the MTC-5 for brightfield imaging with a Cr line on silicon, either without a mount or with one of four mount types.
* Without mount * 25.4mm pin stub * 25mm JEOL stub * 25mm Hitachi M4 stub * Black glass slide
◆ Specifications
| Printed circuit board (PCB) | 525 μm thick boron-doped, ultra-flat Si wafer (<100> orientation) |
| Conductivity | Resistance of 5-15Ω |
| Pattern | Circle, square, hexagon, cross-scale |
| Pattern size | 5 x 5 mm (x 4 locations) |
| Line |
75nm thick, purely bright chromium lines/features (measured from center to center) Lines with a width of 1 μm, spaced at 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, and 100 μm. Lines with a width of 5μm are displayed in rows with intervals of 125μm and 150μm. Lines with a width of 10μm, spaced at 200, 250, 300, 350, 400, 500, 600, 700, 800, 900μm. Display lines 20μm wide arranged at intervals of 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5, and 5mm. |
| Cross-scale | 5mm wide lines, 5x5mm grid, 0.002mm increments |
| Size | 12 x 12 mm |
| Application | Reflected light, scanning electron microscope, optical imaging system |
| Identification | Product ID with serial number engraved. |
| Mount | Available without a mount, or as an option. |
| Supply Style | Supplied in a gel pack box. |
*Prices are subject to change without notice.
*Please inquire about delivery time.
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